Title of article
Cr-doped DLC films in three mid-frequency dual-magnetron power modes
Author/Authors
Xiang، نويسنده , , Yu and Cheng-biao، نويسنده , , Wang and Yang، نويسنده , , Liu and De-yang، نويسنده , , Yu and Zhi-qiang، نويسنده , , Fu، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
5
From page
6765
To page
6769
Abstract
A series of Cr-doped diamond-like carbon (DLC) films were deposited using a mid-frequency dual-magnetron sputtering system, whose sputtering sources had three optional power modes of continuous DC, pulsed DC and AC (40 kHz). Morphology, microhardness, adhesion, and friction properties of the films were investigated using scanning electron microscopy, nano-indentation, scratch adhesion testing, ball-on-disc testing, etc. The results exhibited that the driving voltage waveforms played an important role in the properties of the films, and the properties of the films in pulsed DC mode were superior to those in AC mode and continuous DC mode.
Keywords
Mid-frequency dual-magnetron sputtering , Cr-doped DLC films , Waveforms , properties
Journal title
Surface and Coatings Technology
Serial Year
2006
Journal title
Surface and Coatings Technology
Record number
1812776
Link To Document