Structure and properties of tetrahedral amorphous carbon films implanted with Ti ion

In this paper the structures, mechanical properties and tribological characterization of the tetrahedral amorphous carbon films implanted with Ti ion with energy range from 2 keV to 12 keV using MEVVA implantation have been investigated. The structures of the Ti containing amorphous carbon film have been studied by X-ray photoelectron spectroscopes. The tetrahedral amorphous carbon transform to sp2-rich amorphous carbon during Ti ion implantation. The hardness and elastic modulus of the tetrahedral amorphous carbon films decreases with Ti ion implantation as a result of graphitization of sp3-rich amorphous carbon film. The compressive stress of tetrahedral amorphous carbon films implanted with Ti decreases with increase of ion implantation dose and energy. The friction coefficient of tetrahedral amorphous carbon film implanted with Ti increases with implantation dosage.