• Title of article

    Modelling and optimization of a low-pressure DC glow discharge in stable regime

  • Author/Authors

    Granda-Gutiérrez، نويسنده , , E.E. and Lَpez-Callejas، نويسنده , , Pedro R. and Peٌa-Eguiluz، نويسنده , , R. and Benيtez-Read، نويسنده , , J.S. and Pacheco-Sotelo، نويسنده , , J.O. and Valencia A.، نويسنده , , R. and Mercado-Cabrera، نويسنده , , A. and Barocio، نويسنده , , S.R.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2007
  • Pages
    4
  • From page
    5454
  • To page
    5457
  • Abstract
    A study, both theoretical and experimental, of the steady regime of a glow discharge is reported where a nitrogen plasma is produced by a DC power source operating at a constant current through a 200–500 mA range. Two different models of this plasma are developed. The first one was designed to reproduce the V–I characteristic curve where the transition from the background ionization regime to the saturation one takes place, and, from this, to the Townsend and breakdown regimes, respectively. The second model represents the plasma behaviour as that of a voltage operated current source which follows the power law depending on the gas pressure as i(υ) = Aυn(p). The experimental results confirm, to a high degree of coincidence, the predictions made by these models.
  • Keywords
    Discharges , DC , Ion implantation , Modelling , Low pressure discharges , Medium-density plasma
  • Journal title
    Surface and Coatings Technology
  • Serial Year
    2007
  • Journal title
    Surface and Coatings Technology
  • Record number

    1815704