Facile synthesis of CNTs-doped diamond-like carbon film by electrodeposition

A simple and effective process for synthesis of carbon nanotubes (CNTs)-doped diamond-like carbon (DLC) film via electrodeposition has been reported. Transmission electron microscope (TEM), Raman, X-ray photoelectron spectroscopy (XPS), and Fourier transformation infrared spectrometry (FTIR) were employed to investigate the microstructure, chemical composition, and various carbon phases of the films. The experimental results clearly showed that the CNTs were well dispersed in the carbon film and the D and G bands of the composite carbon film both downshifted comparing with those of the undoped carbon film. The hardness of the carbon film was improved with the incorporation of CNTs from 10.28 to 12.47 GPa, while the Youngʹs modulus was decreased from 253.64 to 206.66 GPa. Simultaneously, the residual stress of the carbon film was greatly reduced from 1.2 to 0.83 GPa after the incorporation of CNTs.