Synthesis of diamond films from organic compounds by Pulsed Liquid Injection CVD

Diamond films were deposited onto Si substrates by Pulsed Liquid Injection Chemical Vapor Deposition (PLICVD) by the flash evaporation of small micro-doses of acetone, ethanol and methanol into the evaporation zone, at 280 °C. The resulting vapor mixture is transported by a carrier gas into the high-temperature reaction chamber, where the diamonds nucleate and grow onto the substrate at 850 °C. The films, characterized by Raman spectroscopy and Scanning Electron Microscopy, show ball-shaped structures in the 200 to 500 nm range, as well as the characteristic Raman diamond band at 1332 cm− 1. The effect of the experimental parameters is analyzed and discussed in terms of their crystallinity, composition, structure and morphology.