Title of article
Recognition of semiconductor defect patterns using spatial filtering and spectral clustering
Author/Authors
Chih-Hsuan Wang، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2008
Pages
10
From page
1914
To page
1923
Keywords
Defect pattern , Fuzzy clustering , Data mining , Spectral clustering
Journal title
Expert Systems with Applications
Serial Year
2008
Journal title
Expert Systems with Applications
Record number
187004
Link To Document