Title of article
A new intelligent SOFM-based sampling plan for advanced process control
Author/Authors
Jang-Hee Lee، نويسنده , , Sung Jin You، نويسنده , , Sang-Chan Park، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
19
From page
133
To page
151
Keywords
Self-Organizing Feature Map , neural network , Sampling plan , Process parameter , semiconductor manufacturing , Wafer Bin Map
Journal title
Expert Systems with Applications
Serial Year
2001
Journal title
Expert Systems with Applications
Record number
197866
Link To Document