Title of article
Development of an array of transition edge sensors for application in X-ray astronomy
Author/Authors
Bruijn، نويسنده , , Marcel P. and Baars، نويسنده , , Norman H.R. and Bergmann Tiest، نويسنده , , Wouter M. and Germeau، نويسنده , , Alexander and Hoevers، نويسنده , , Henk F.C. and de Korte، نويسنده , , Piet A.J. and Mels، نويسنده , , Wim A. and Ridder، نويسنده , , Marcel L. and Krouwer، نويسنده , , Eric and van Baar، نويسنده , , John J. and Wiegerink، نويسنده , , Remco J. Wiegerink and Roelof F. Wassenaar ، نويسنده ,
Pages
3
From page
443
To page
445
Abstract
We report on the development activities towards a cryogenic array of micro-calorimeters, based on voltage-biased Ti/Au transition edge thermometers. Fabrication issues are discussed along the lines of two fabrication routes. One route utilizes bulk micromachining in [1 1 0] Si wafers, the other route surface micromachining with a sacrificial layer. Prototype 5×5 arrays have been fabricated and we present the first performance data: Two arrays were irradiated with 5.9 keV X-ray irradiation and an energy resolution of 6–7 eV FWHM was obtained. The arrays have been designed and their performance is analyzed with the aid of finite element simulation of the electrothermal behavior of a single pixel and thermal conductivity in the supporting structure.
Keywords
XEUS , Microcalorimeter , X-ray Astronomy , Cryogenic sensor , Micro machining , Imaging array , X-ray detector
Journal title
Astroparticle Physics
Record number
2022937
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