Chemical sensors and biosensors in liquid environment based on microcantilevers with amplified quality factor

A new technique is presented for bio/chemical sensors, based on microcantilevers, for detection in liquid environment. The low quality factor of the cantilever in liquid is increased up to three orders of magnitude by using Q-control. This enables AC detection that is immune to the long-term drift of the DC cantilever response in liquids, and to temperature variations. This technique has been applied for the detection of ethanol in aqueous solution by using the microbalance method, and for antibody/antigen recognition by the surface stress method. The results show the feasibility and very high sensitivity of these novel devices.