Title of article
Thermal AFM: a thermopile case study
Author/Authors
Fonseca، نويسنده , , L. and Pérez-Murano، نويسنده , , F. and Calaza، نويسنده , , C. and Rubio، نويسنده , , R. and Santander، نويسنده , , J. To-Figueras، نويسنده , , E. and Gracia، نويسنده , , I. and Cané، نويسنده , , C. and Moreno، نويسنده , , M. and Marco، نويسنده , , S.، نويسنده ,
Pages
7
From page
153
To page
159
Abstract
In this work, an atomic force microscope (AFM) with an integrated thermal sensor has been used to obtain the local spatial distribution of temperatures in a micromachined thermopile with submicron resolution. In this communication, we will show how the dimensional, structural and functional characteristics of a thermopile suits well with the requirements for AFM thermal imaging, and how a deeper insight of the thermopile operation can be gained with the aid of these advanced scanning probe-based tools.
Keywords
Thermal probing , Micromechanical devices , atomic force microscopy , Thermopiles
Journal title
Astroparticle Physics
Record number
2047980
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