Title of article
Method to detect the property of complex oxide structure formed by AFM anodic oxidation completely
Author/Authors
Dengfeng، نويسنده , , Kuang and Qinggang، نويسنده , , Liu and Weilian، نويسنده , , Guo and Shilin، نويسنده , , Zhang and Xiaotang، نويسنده , , Hu، نويسنده ,
Pages
4
From page
111
To page
114
Abstract
Thin titanium film (3∼8 nm thick) can be oxidized completely with atomic force microscope anodic oxidation to form a metal–insulator–metal structure to fabricate various nanodevices. Whether the Ti film is oxidized down to the bottom is vital to the nanodevices. We have fabricated a delicate Ti oxide structure of two triangles on about 3 nm thick Ti film. The theoretical calculation of the ratio of h ox / d Ti = 0.58 indicates the Ti film has been oxidized completely.
Keywords
Nanotitanium film , AFM anodic oxidation , Nano-oxide structure , Conductivity
Journal title
Astroparticle Physics
Record number
2048172
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