Title of article
X-ray analysis and mapping by wavelength dispersive X-ray spectroscopy in an electron microscope
Author/Authors
Tanaka، نويسنده , , Miyoko and Takeguchi، نويسنده , , Masaki and Furuya، نويسنده , , Kazuo، نويسنده ,
Pages
5
From page
1427
To page
1431
Abstract
A compact and easy-to-use wavelength dispersive X-ray spectrometer using a multi-capillary X-ray lens attached to a scanning (transmission) electron microscope has been tested for thin-film analysis. B–K spectra from thin-film boron compounds (B4C, h-BN, and B2O3) samples showed prominent peak shifts and detailed structural differences. Mapping images of a thin W/Si double-layer sample resolved each element clearly. Additionally, a thin SiO2 film grown on a Si substrate was imaged with O–K X-rays. Energy and spatial resolution of the system is also discussed.
Keywords
STEM , MCX , Boron compounds , WDS , W , SI , Elemental mapping , SEM
Journal title
Astroparticle Physics
Record number
2049217
Link To Document