Title of article
Measurement of specimen thickness by phase change determination in TEM
Author/Authors
Croitoru، نويسنده , , M.D. and Van Dyck، نويسنده , , D. and Liu، نويسنده , , Y.Z. and Zhang، نويسنده , , Z.، نويسنده ,
Pages
7
From page
1616
To page
1622
Abstract
A non-destructive method for measuring the thickness of thin amorphous films composed of light elements has been developed. The method employs the statistics of the phase of the electron exit wave function. The accuracy of this method has been checked numerically by the multislice method and compared with that based on the mean inner potential.
Keywords
Amorphous materials , thickness measurement , Multislice simulation
Journal title
Astroparticle Physics
Record number
2049278
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