Title of article
Structural, optical and electrical properties of state of the art cubic SiC films
Author/Authors
J. Stoemenos، نويسنده , , J. and Dezauzier، نويسنده , , C. and Arnaud، نويسنده , , G. and Contreras، نويسنده , , S. and Camassel، نويسنده , , J. and Pascual، نويسنده , , J. and Robert، نويسنده , , J.L.، نويسنده ,
Pages
5
From page
160
To page
164
Abstract
The structural, optical and electrical characteristics of commercially available cubic (β)-SiC films grown on 〈001〉 silicon waters were reported. For the structural characterization, combined plane view and cross-section transmission electron spectroscopy observations were made. For the optical investigations, low-temperature photoluminescence (2 K) and room temperature Raman and infrared spectra were measured. For the electrical characterization, Hall effect and resistivity measurements were performed in the temperature range 15–500 K.
Keywords
silicon carbide , Transmission electron microscopy , Optical properties , electrical measurements
Journal title
Astroparticle Physics
Record number
2063133
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