Preparation and characterization of iron oxide films by the excimer laser ablation of poly(ferric methacrylate)

Iron oxide films were deposited on fused quartz substrates by the excimer laser ablation of poly(ferric methacrylate). Several experimental factors, such as pulse laser energy, chamber vacuum, substrate temperature and reactive atmosphere have been investigated, Iron oxide films with high appearance quality have been obtained. Characterization by XPS and Raman spectroscopy shows that the deposited films essentially consist of iron-rich Fe3O4 and α-Fe2O3 phases. The pyrolysis of poly(ferric methacrylate) was also discussed.