Intermetallic products formed by joint cold cathode vacuum arc sputtering of titanium and aluminium

The results of investigation of coatings formed by means of dual cold cathode vacuum arc sputtering are presented. In cathode sputtering, using a plasma accelerator one usually try to diminish the liquid drops fraction in the accelerated plasma. Here deposited species include droplets, vapour and ions. Products of Ti and Al sputtering on cold and hot copper alloy and steel substrates have been investigated. The deposited layers have been characterised by X-ray diffraction and the morphology of surfaces has been studied by optical metallography. Characteristics of layers formed by participation of quenched droplets versus “pure” ion sputtering have been compared. Feasibility of vacuum arc plasma accelerator to form nanocrystalline and amorphous coatings is discussed. Layers consisting of Ti, Al, intermetallics TIAl3, TiAl2 and TiAl have been obtained.