Title of article
Metrological, electrical and thermal analysis of semiconductor structures using scanning force microscopy
Author/Authors
Müller-Zülow، نويسنده , , B. and Maywald، نويسنده , , M. and Cramer، نويسنده , , R.M. and Sprengepiel، نويسنده , , J. and Gehring، نويسنده , , S.، نويسنده ,
Pages
4
From page
74
To page
77
Abstract
New modes of scanning force microscopy as related to semiconductor research are introduced. These cover quantitative three dimensional metrology, local determination of sample voltages and the evaluation of electrical and thermal features. All of these modes can be operated with nanometer resolution in principle and allow a comprehensive analysis of the material or device under test without the need for extensive sample preparation.
Keywords
scanning force microscopy , Electrical analysis , Semiconductor structures , thermal analysis
Journal title
Astroparticle Physics
Record number
2064355
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