Title of article
Optical waveguides etched in 6FDA-ODA by focused ion beam
Author/Authors
Chiron، نويسنده , , D. and Trigaud، نويسنده , , T. and Moliton، نويسنده , , J.P.، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 2001
Pages
3
From page
33
To page
35
Abstract
Here is described a dry process to etch optical waveguides in polymers without geometric defect of the guiding structure. The dimensions are optimized for wavelengths of around 1.5 μm used in telecommunications. The implementation of focused ion beam (FIB
Keywords
6FDA-ODA polyimide , FIB , Optical waveguide , Nanometric etching
Journal title
Synthetic Metals
Serial Year
2001
Journal title
Synthetic Metals
Record number
2075442
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