Polymer microcavities by room temperature electron-beam evaporation of TiOx and SiOx

We report on monolithic symmetric vertical microcavities exploiting two TiCx/SiOx distributed Bragg reflectors (DBRs), realized by means of electron-beam evaporation. The whole nanofabrication process is carried out without heating the chamber atmosphere, thus allowing the direct evaporation of the top dielectric mirror onto the organic layer previously spin-cast on the bottom DBR stack. The high adhesion to the substrate, the possibility of employing active media of low softness temperature, and the absence of any degradation of the emission properties of the organic compound opens the way for novel vertical emitting resonators and monolithic photo-and electroluminescent microcavities. Our mirrors exhibit a stop-band reflectivity higher than 95% and a spectral width of more than 170 nm.