Title of article
Microstructure of ceramic thin films
Author/Authors
Waser، نويسنده , , Rainer M، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1996
Pages
9
From page
706
To page
714
Abstract
The prospect of new devices in microelectronics and microsystem techniques has led to wide-spread research efforts in the processing and characterization of electroceramic thin films. One of the focal issues is the microstructure of these films, which ultimately determines the functional properties.
Journal title
Current Opinion in Solid State and Materials Science
Serial Year
1996
Journal title
Current Opinion in Solid State and Materials Science
Record number
2087795
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