Title of article
Properties of polycrystalline SrRuO3 thin films on Si substrates
Author/Authors
Watanabe، نويسنده , , Koji and Ami، نويسنده , , Miho and Tanaka، نويسنده , , Masahiro، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1997
Pages
14
From page
83
To page
96
Abstract
The perovskite SrRuO3 thin films were deposited on Si(100) substrates using pulsed laser deposition. These thin films had columnar structures and exhibited good surface morphology and good barrier characteristics for Si. The films exhibited metallic conductivities, with a room temperature resistivity of 529 μΩ · cm. These thin films can be useful in many applications, such as electrodes for ferroelectric and electro-optic devices.
Keywords
B. Laser deposition , D. Diffusion , D. Electrical properties , A. Thin films , A. Oxides
Journal title
Materials Research Bulletin
Serial Year
1997
Journal title
Materials Research Bulletin
Record number
2093418
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