On the crystallization kinetics of solution deposited PZT thin films

The crystallization kinetics of strongly textured (100)-PZT thin films on highly textured (111)-Pt have been investigated in the temperature range from 550 to 700°C. It is shown that the crystallization proceeds by the formation of globular, Zr-depleted, and Pb-rich particles that show necklace patterns. The crystallization kinetics can be described by an Avrami type analysis with a rate exponent of 1.3 and an activation energy of 141 kJ/mol. The relative dielectric constant depends strongly on the firing temperature and time, and ranges from 650 to 4000.