Title of article
Modelling and analysis of MEMS sensor based on piezoresistive effects
Author/Authors
Kaabi، نويسنده , , L. and Kaabi، نويسنده , , A. and Sakly، نويسنده , , J. and AbdelMalek، نويسنده , , F.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
4
From page
691
To page
694
Abstract
In this paper, we present a detailed study and analysis of piezoresistive effects on a membrane suspended in air based sensor. The variation of its capacitance under flow of stress or gas is investigated. The developed approach allows us to extract the material parameters in accurate way.
Keywords
Modelling , capacitance , Pressure , Sensors , MEMS
Journal title
Materials Science and Engineering C
Serial Year
2007
Journal title
Materials Science and Engineering C
Record number
2096577
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