Title of article
Metrological, electrical and thermal analysis of semiconductor structures using scanning force microscopy
Author/Authors
Müller-Zülow، نويسنده , , B. and Maywald، نويسنده , , M. and Cramer، نويسنده , , R.M. and Sprengepiel، نويسنده , , J. and Gehring، نويسنده , , S.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1997
Pages
4
From page
74
To page
77
Abstract
New modes of scanning force microscopy as related to semiconductor research are introduced. These cover quantitative three dimensional metrology, local determination of sample voltages and the evaluation of electrical and thermal features. All of these modes can be operated with nanometer resolution in principle and allow a comprehensive analysis of the material or device under test without the need for extensive sample preparation.
Keywords
Semiconductor structures , Electrical analysis , scanning force microscopy , thermal analysis
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
1997
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2132150
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