• Title of article

    Chemical bevelling of GaAs-based structures

  • Author/Authors

    Srnanek، نويسنده , , R and Novotny، نويسنده , , I and Hotovy، نويسنده , , I and Gomati، نويسنده , , M.El، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1997
  • Pages
    4
  • From page
    127
  • To page
    130
  • Abstract
    By using H3PO4/H2O2/H2O etchant bevels through GaAs based structures were prepared. The bevels had angles lower than 5×10−4 rad and good profile linearity. For the bevel surface observation optical interference microscopy was used.
  • Keywords
    Gallium arsenide , Optical interference microscopy , Chemical bevelling
  • Journal title
    MATERIALS SCIENCE & ENGINEERING: B
  • Serial Year
    1997
  • Journal title
    MATERIALS SCIENCE & ENGINEERING: B
  • Record number

    2132475

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=2132475