• Title of article

    Numerical simulation of implanted top-gate 6H–SiC JFET characteristics

  • Author/Authors

    Lades، نويسنده , , M and Berz، نويسنده , , D and Schmid، نويسنده , , U and Sheppard، نويسنده , , S.T and Kaminski، نويسنده , , N and Wondrak، نويسنده , , W and Wachutka، نويسنده , , G، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1999
  • Pages
    4
  • From page
    415
  • To page
    418
  • Abstract
    A detailed numerical analysis of implanted top-gate 6H–SiC JFET structures was performed revealing the influence of a non-uniform channel doping profile. Based on structural parameters extracted from simulations of the device characteristics at various bias conditions and temperatures, we obtain channel mobility parameters close to Hall data for bulk epitaxial layers.
  • Keywords
    Reverse modeling , JFET , Simulation , High-temperature , SiC
  • Journal title
    MATERIALS SCIENCE & ENGINEERING: B
  • Serial Year
    1999
  • Journal title
    MATERIALS SCIENCE & ENGINEERING: B
  • Record number

    2134131