Title of article
Baseline variations near the nitrogen impurity vibrational bands in the infrared spectra of Czochralski silicon
Author/Authors
Shirai، نويسنده , , Hiroshi and Kashima، نويسنده , , Kazuhiko، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
3
From page
33
To page
35
Abstract
In the infrared absorbance spectra of nitrogen impurities in Czochralski silicon, a series of vibrational modes related to thermal donors causes baseline variations near the nitrogen-related vibrational bands in the range 950–1050 cm−1. Baseline varies depending on the difference in thermal donor formation between the test and reference samples.
Keywords
Thermal donors , Czochralski silicon , Nitrogen
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
2002
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2138692
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