• Title of article

    Baseline variations near the nitrogen impurity vibrational bands in the infrared spectra of Czochralski silicon

  • Author/Authors

    Shirai، نويسنده , , Hiroshi and Kashima، نويسنده , , Kazuhiko، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2002
  • Pages
    3
  • From page
    33
  • To page
    35
  • Abstract
    In the infrared absorbance spectra of nitrogen impurities in Czochralski silicon, a series of vibrational modes related to thermal donors causes baseline variations near the nitrogen-related vibrational bands in the range 950–1050 cm−1. Baseline varies depending on the difference in thermal donor formation between the test and reference samples.
  • Keywords
    Thermal donors , Czochralski silicon , Nitrogen
  • Journal title
    MATERIALS SCIENCE & ENGINEERING: B
  • Serial Year
    2002
  • Journal title
    MATERIALS SCIENCE & ENGINEERING: B
  • Record number

    2138692