Near-field acoustic microscopy of ferroelectrics and related materials

Ferroelectric ceramics and crystals, semiconductor on insulator material and MEMS device have been observed in scanning electron acoustic microscope. The images demonstrate the ability of the microscope to image surface texture, subsurface defect, domain structure and to penetrate opaque layers non-destructively. Ferroelectric domains viewed by scanning probe acoustic microscope based on atomic force microscope are also presented in order to compare both near-field acoustic techniques.