Vibration analysis of stepping piezoelectric micro-motor using wiggle mode

Piezoelectric ultrasonic motor, a fractional horsepower motor, is different from conventional electromagnetic motor. It combines the features such as lightweight package, high driving torque at low speed, quick response, low consume, zero backlash, self-braking at zero power, no electromagnetic disturbance and noise, and high heat-stability in wicked environment. In this paper, we propose a new type of stepping piezoelectric micro-motor using wiggle vibration mode and three-dimensional contacts between the rotor and stator. Micro-vibration behavior and vibration mode shape of the prototype have been investigated using advanced POLYTEC PSV-300-F laser Doppler vibrometer. The piezoelectric micro-motor has potential applications for camera auto focus lenses, medical apparatus, micro-robots, micro-satellites, precise positioning, micro-machining, aerospace instruments, laser communication, etc. Here, using such two piezoelectric motors an improved manipulator with two degrees of freedom has been realized.