X-ray, optical and electrical characterization of doped nanocrystalline titanium oxide thin films

In the present work we have reported results of basic optical and X-ray diffraction examinations of modified titanium oxide thin films. Samples were obtained by deposition in low-pressure hot target magnetron sputtering process. Besides structural and optical properties special interest has been put onto electrical properties of obtained layers. It has been shown that atoms of transition or noble metals, such in this case V, Co and Pd ones modify the electronic state structure of oxide what results in different type of electrical conductivity depended on sample composition.