Title of article
Photoluminescence of oxidized porous silicon under UV-light illumination
Author/Authors
Zhao، نويسنده , , Yue and Yang، نويسنده , , Deren and Li، نويسنده , , Dongsheng and Jiang، نويسنده , , Minghua، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
4
From page
95
To page
98
Abstract
The blue emission resulting from the as-prepared and oxidized porous silicon (PS) was reported in this paper. After the oxidation in plasma enhanced chemical vapor deposition (PECVD) process, the blue emission intensity in photoluminescence (PL) spectra increased because it is believed that the blue emission came from defects in silicon dioxides. Under UV-light illumination, the stability of the blue emission of the N-type oxidized PS was improved due to oxidation.
Keywords
Blue emission , PECVD method , Porous silicon , Oxidation
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
2005
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2142220
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