Microscopic behavior of Sb in chalcogenide materials for crystallization process

The microscopic behavior of the chalcogenides materials alloys has been investigated for the understanding of the crystallization process. To analyze the crystallization–amorphization temperature by endo–exothermic process differential scanning calorimetry is carried out. Knowing the crystallization activation energy, we have performed in situ transmission electron microscopy with heating-rate change. With increasing temperature, as-deposited amorphous films transform to the crystalline phase, and Sb depletion takes place near 573 K. For the calculation of activation energy, the measured data obtained from heating-rate changes is plotted according to the Kissinger equation. The crystallization activation energy of the chalcogenide material is 2.03 ± 0.2 eV.