Title of article
New optical probes using InP-based cantilevers
Author/Authors
Castagne، نويسنده , , M and Belier، نويسنده , , B and Gall، نويسنده , , P and Benfedda، نويسنده , , M and Seassal، نويسنده , , C and Spisser، نويسنده , , A and Leclerc، نويسنده , , J.L and Viktorovich، نويسنده , , P، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 1998
Pages
4
From page
81
To page
84
Abstract
Cantilevers made of III–V ternary compounds have been especially designed to obtain a spring constant in the classical range of 0.1 N/m. They are successfully fabricated by epitaxial growth techniques on InP substrate and wet etching. The layer structure is intended to further contribute in a microoptoelectronic device. The cantilever is afterwards provided with a carbon supertip which is expected to play simultaneously both roles of an atomic force sensor and an optical near-field converter.
Keywords
Microfabrication , cantilevers , Near field optics , Integrated photodetector
Journal title
Ultramicroscopy
Serial Year
1998
Journal title
Ultramicroscopy
Record number
2154881
Link To Document