• Title of article

    Patterned diamond microcolumns for field emitter

  • Author/Authors

    Cho، نويسنده , , Hunsuk and Baik، نويسنده , , Young-Joon and Jeon، نويسنده , , D، نويسنده ,

  • Issue Information
    دوماهنامه با شماره پیاپی سال 1998
  • Pages
    4
  • From page
    125
  • To page
    128
  • Abstract
    We have fabricated an array of diamond microcolumns on a silicon substrate using the following process: Fine diamond crystallites were mixed in acetone and seeded on a silicon wafer using an ultrasonic shaker. A silicon oxide film was deposited on the silicon substrate, and an array of holes was formed in the oxide film by back-etching until the diamond-seeded substrate was exposed. Diamond was grown using chemical vapor deposition. Diamond grains grew from the diamond-seeded substrate and filled the holes in the oxide layer, resulting in the formation of an array of diamond microcolumns.
  • Keywords
    Diamond film , Field emitter
  • Journal title
    Ultramicroscopy
  • Serial Year
    1998
  • Journal title
    Ultramicroscopy
  • Record number

    2155011