An experimentally convenient configuration for electron channeling contrast imaging

Electron channeling contrast imaging (ECCI) has historically employed a highly tilted sample with a forward-scattered electron detector for viewing near-surface crystal defects in thick (electron opaque) samples. This paper demonstrates that ECCI may be performed successfully using more conventional backscattered electron detectors and a sample surface oriented near normal to the electron beam. The dislocation contrast characteristics seen using this low-tilt configuration are found to be comparable to the dislocation contrast characteristics using the high-tilt configuration. Additionally, dislocation contrast characteristics as a function of deviation from the exact Bragg channeling condition are presented.