Title of article
Thermal AFM: a thermopile case study
Author/Authors
Fonseca، نويسنده , , L. and Pérez-Murano، نويسنده , , F. and Calaza، نويسنده , , C. and Rubio، نويسنده , , R. and Santander، نويسنده , , J. To-Figueras، نويسنده , , E. and Gracia، نويسنده , , I. and Cané، نويسنده , , C. and Moreno، نويسنده , , M. and Marco، نويسنده , , S.، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 2004
Pages
7
From page
153
To page
159
Abstract
In this work, an atomic force microscope (AFM) with an integrated thermal sensor has been used to obtain the local spatial distribution of temperatures in a micromachined thermopile with submicron resolution. In this communication, we will show how the dimensional, structural and functional characteristics of a thermopile suits well with the requirements for AFM thermal imaging, and how a deeper insight of the thermopile operation can be gained with the aid of these advanced scanning probe-based tools.
Keywords
atomic force microscopy , Thermal probing , Micromechanical devices , Thermopiles
Journal title
Ultramicroscopy
Serial Year
2004
Journal title
Ultramicroscopy
Record number
2156249
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