Projected potential profiles across interfaces obtained by reconstructing the exit face wave function from through focal series

An iterative method for reconstructing the exit face wave function from a through focal series of transmission electron microscopy image line profiles across an interface is presented. Apart from high-resolution images recorded with small changes in defocus, this method works also well for a large defocus range as used for Fresnel imaging. Using the phase-object approximation the projected electrostatic as well as the absorptive potential profiles across an interface are determined from this exit face wave function. A new experimental image alignment procedure was developed in order to align images with large relative defocus shift. The performance of this procedure is shown to be superior to other image alignment procedures existing in the literature. The reconstruction method is applied to both simulated and experimental images.