Title of article
Measurement of specimen thickness by phase change determination in TEM
Author/Authors
Croitoru، نويسنده , , M.D. and Van Dyck، نويسنده , , D. and Liu، نويسنده , , Y.Z. and Zhang، نويسنده , , Z.، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 2008
Pages
7
From page
1616
To page
1622
Abstract
A non-destructive method for measuring the thickness of thin amorphous films composed of light elements has been developed. The method employs the statistics of the phase of the electron exit wave function. The accuracy of this method has been checked numerically by the multislice method and compared with that based on the mean inner potential.
Keywords
thickness measurement , Amorphous materials , Multislice simulation
Journal title
Ultramicroscopy
Serial Year
2008
Journal title
Ultramicroscopy
Record number
2157439
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