Title of article
Characterization of an ONO-stacked insulator film for a silicon micro-strip detector
Author/Authors
Okuno، نويسنده , , Shoji and Ikeda، نويسنده , , Hirokazu and Saitoh، نويسنده , , Yutaka and Akamine، نويسنده , , Tadao and Inoue، نويسنده , , Masahiro and Yamanaka، نويسنده , , Junko and Kadoi، نويسنده , , Kiyoaki and Kojima، نويسنده , , Yoshikazu and Miyahara، نويسنده , , Shin-ichi and Kamiya، نويسنده , , Masaaki، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1997
Pages
7
From page
299
To page
305
Abstract
A semi-empirical model for an ONO-stacked insulator film is presented together with its implications. The model covers ONO, ON, and NO films as well as single-layered SiO2 and Si3N4. We eventually present an assessment for estimating the lifetime of an ONO-stacked insulator film for a given configuration.
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
1997
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2174756
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