• Title of article

    Submicron X-ray diffraction

  • Author/Authors

    MacDowell، نويسنده , , A.A. and Celestre، نويسنده , , R.S. and Tamura، نويسنده , , N. and Spolenak، نويسنده , , R. and Valek، نويسنده , , B. and Brown، نويسنده , , W.L. and Bravman، نويسنده , , J.C. and Padmore، نويسنده , , H.A. and Batterman، نويسنده , , B.W. and Patel، نويسنده , , J.R.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2001
  • Pages
    8
  • From page
    936
  • To page
    943
  • Abstract
    At the Advanced Light Source in Berkeley we have instrumented a beam line that is devoted exclusively to X-ray micro-diffraction problems. By micro-diffraction we mean those classes of problems in Physics and Materials Science that require X-ray beam sizes in the sub-micron range. The instrument is for instance, capable of probing a sub-micron size volume inside micron-sized aluminum metal grains buried under a silicon dioxide insulating layer. The resulting Laue pattern is collected on a large area CCD detector and automatically indexed to yield the grain orientation and deviatoric (distortional) strain tensor of this sub-micron volume. A four-crystal monochromator is then inserted into the beam, which allows monochromatic light to illuminate the same part of the sample. Measurement of the diffracted photon energy allows for the determination of d spacings. The combination of white and monochromatic beam measurements allow for the determination of the total strain/stress tensor (6 components) inside each sub-micron-sized illuminated volume of the sample.
  • Keywords
    Electromigration , X-ray focusing , X-ray micro-diffraction
  • Journal title
    Nuclear Instruments and Methods in Physics Research Section A
  • Serial Year
    2001
  • Journal title
    Nuclear Instruments and Methods in Physics Research Section A
  • Record number

    2192174