Title of article
Cryogenic Dark Matter Search detector fabrication process and recent improvements
Author/Authors
Iris Jastram، نويسنده , , A. and Harris، نويسنده , , H.R. and Mahapatra، نويسنده , , R. and Phillips، نويسنده , , J. and Platt، نويسنده , , M. and Prasad، نويسنده , , K. F. Sander، نويسنده , , J. and Upadhyayula، نويسنده , , S.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2015
Pages
12
From page
14
To page
25
Abstract
A dedicated facility has been commissioned for Cryogenic Dark Matter Search (CDMS) detector fabrication at Texas A&M University (TAMU). The fabrication process has been carefully tuned using this facility and its equipment. Production of successfully tested detectors has been demonstrated. Significant improvements in detector performance have been made using new fabrication methods/equipment and tuning of process parameters.
Keywords
Semiconductor detector , Cryogenic detector , CDMS , Transition edge sensor , Photolithography , Dark matter
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2015
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2196959
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