Transition edge sensor–energy-dispersive spectrometer (TES–EDS) using a cryogen-free dilution refrigerator for material analysis

A cryogen-free energy-dispersive spectrometer (EDS) using a transition edge sensor (TES) was developed for material analysis. This system can maintain a temperature at 130 mK within 30 μK, and has good energy resolution (19 eV for Mn-Kα) for long-time measurement with a drift in the DC level of less than 0.02 eV/min. This system utilizes a dilution refrigerator (φ 272 mm×height 572 mm) and has a snout (370 mm long and φ25 mm) similar to that in a conventional EDS system. The dilution refrigerator is pre-cooled by a GM refrigerator. A flexible tube between the dilution refrigerator and GM refrigerator damps the mechanical vibration of the GM refrigerator. Two shields (4 and 80 K) thermally protect the Cu rod (φ8 mm) cooled to be 100 mK. Windows composed of polyimide+Al film allow X-ray detection above the C-Kα line. A TES (6 mm×6 mm) and array SQUID amplifier (1.5 mm×3 mm) are mounted on top of the Cu rod. For Mn-Kα, the pulse height is 5.5 μA and decay time (τeff) is 90 μs. The maximum count rate (1/20 τeff) is estimated at about 500 cps.