Design modification in rotor blade of turbo molecular pump

Performance of a Turbo Molecular Pump (TMP) is strongly related to the frequency of the rotor. As rpm increases deflection in the rotor blades starts to occur. Therefore, quality of material and blade design has been modified in order to obtain stable performance at higher speed. To reduce the deformation, stiffer material and change in blade design have been calculated. Significant improvement has been achieved in modeling the blade design using CATIA software. The analysis has been performed by ANSYS workbench. It is shown that the modification in the blade design of TMP rotor has reduced the structural deformation up to 66 percent of the deformation produced in the original blade design under the same conditions. Modified design achieved additional 23 percent rpm which increased TMPʹs efficiency.