Biased sample holder for complete correction of SIMS transmission losses with tilted samples

For investigation of fundamental aspects of secondary ion mass spectrometry (SIMS) such as secondary ion distributions, roughness formation or simply for optimisation of a particular analysis, the ability to tilt a sample is vital. However many instruments suffer transmission losses when the sample is tilted. This phenomenon has been investigated for the Cation Mass Spectrometer (CMS) instrument using Monte Carlo simulations and the cause determined to be modification of the extraction field arising from the sample tilt. A new sample holder incorporating biasing electrodes has been developed to eliminate transmission losses during SIMS analysis when using tilted samples. Simulations and experimental result confirm complete elimination of transmission losses for sample tilts of up to 20°.