• Title of article

    Autocollimators for deflectometry: Current status and future progress

  • Author/Authors

    Geckeler، نويسنده , , Ralf D. and Just، نويسنده , , Andreas and Krause، نويسنده , , Michael and Yashchuk، نويسنده , , Valeriy V.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2010
  • Pages
    7
  • From page
    140
  • To page
    146
  • Abstract
    The proliferation of autocollimator-based surface profilometers at synchrotron metrology laboratories worldwide necessitates a detailed understanding of the parameters influencing their angular response. A comprehensive overview of the current status of autocollimator characterization and calibration at the Physikalisch-Technische Bundesanstalt (PTB) and its implications for their optimal application are provided. Present and future challenges to angle metrology posed by autocollimator-based surface profilometers will be delineated, and solutions and expected progress to meet them will be outlined.
  • Keywords
    Topography measurement , Precision metrology , Autocollimator , Angle calibration , Angle , Traceability
  • Journal title
    Nuclear Instruments and Methods in Physics Research Section A
  • Serial Year
    2010
  • Journal title
    Nuclear Instruments and Methods in Physics Research Section A
  • Record number

    2211484