Title of article
Autocollimators for deflectometry: Current status and future progress
Author/Authors
Geckeler، نويسنده , , Ralf D. and Just، نويسنده , , Andreas and Krause، نويسنده , , Michael and Yashchuk، نويسنده , , Valeriy V.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2010
Pages
7
From page
140
To page
146
Abstract
The proliferation of autocollimator-based surface profilometers at synchrotron metrology laboratories worldwide necessitates a detailed understanding of the parameters influencing their angular response. A comprehensive overview of the current status of autocollimator characterization and calibration at the Physikalisch-Technische Bundesanstalt (PTB) and its implications for their optimal application are provided. Present and future challenges to angle metrology posed by autocollimator-based surface profilometers will be delineated, and solutions and expected progress to meet them will be outlined.
Keywords
Topography measurement , Precision metrology , Autocollimator , Angle calibration , Angle , Traceability
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
2010
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
2211484
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