Potentials of Different Process Kinematics in Micro Grinding

The work described in this paper evaluates the potentials of different process kinematics in micro grinding. First investigations in peripheral and face grinding pointed to specific characteristics of these processes. The machining process can be characterised by the surface quality of the parts. Based on these results improvements for highest surface quality and the reduction of thermal loads are developed. One possibility to minimize the influence of the micro geometry of the grinding tool is the application of ultrasonic grinding. By using an ultra precision machine tool and fine grained grinding wheels high surface qualities can be achieved.