Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control

A microprobe system with a micrometer size probe sphere is required to establish the nano-CMM that is a three dimensional coordinate measuring machine with a measuring range of mm and accuracy of nm order. In this paper, the newly developed vibrational probing technique for the microprobe sytem is presented. The principle is based on the single-beam gradient-force optical trap and the forced vibration method. An optically trapped silica particle in air is vibrated using the laser beam scanning method. Frequency response is examined to estimate the radial spring constant of the microprobe system. Fundamental measurements of a micro-step specimen fabricated using a FIB (Focused Ion Beam) process are demonstrated to investigate the position detection sensitivity.