A New Fluid Bearing Utilizing Traveling Waves

A new non-contact fluid bearing, which utilizes traveling waves, is proposed in the present research. The moving part is supported with a thin fluid film compressed by the waves traveling radially on the bearing surface. Conventional hydrostatic bearings utilize externally compressed fluid, which requires plumbing and compressors. On the other hand, the proposed bearing realizes non-contact smooth motion without such a large apparatus, and furthermore it has a capability to electrically control the bearing force or clearance. A prototype air bearing is developed on the basis of the proposed principle by utilizing piezo-electric actuators, and its non-contact smooth motion is confirmed.