A high performance tilting platform driven by hybrid actuator

Multi-axis controlled machine tools require a tilting rotary table or a tilting spindle head. In order to realize an ultraprecision multi-axis machine tool, it is an important issue to develop a high performance tilting platform. This paper presents a newly developed hybrid actuator-driven tilting platform. The hybrid actuator is constructed by integrating a pneumatic rotary actuator and a couple of voice coil motors. Performance evaluation results confirm that the platform provides high precision and high torque motions.