A newly developed long range positioning table system with a sub-nanometer resolution

Demands for nano-positioning over a long range have recently increased in a variety of industries. This paper presents a long range positioning table system with a sub-nanometer resolution. The table system developed is characterized by a motion error-minimized structure, and the table motion is implemented by a cooperative control of the primary and the secondary tables. Successful implementation of a laser interferometer makes it possible to achieve the Abbeʹs error free measurement and a long range positioning with a sub-nanometer resolution. Experimental results confirm that the table system achieves sub-nanometer positioning over a 150 mm range.